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PPT : Automotive Sensors: MEMS

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Where it Began
* 1979 – First recorded use of MEMs in automobiles
* Federal emission standards required monitoring the air-to-fuel ratio of the engine
o Density of air value was needed
* Many different sensor technologies were introduced to solve this problem
* MAP (manifold absolute pressure) and MAT (manifold air temperature) sensors were developed using MEMS
* Silicon based MEMS sensors became the device of choice due to low cost and high yield
* Two groups
o Delco Electronics Group(General Motors)
+ Used piezoresistive sensing
o Ford
+ Used capacitive sensing

Piezoresistive Sensors
* Use the piezoresistive effect
o Applied stress changes resistivity of material

Diaphragm with two embedded piezoresisters
Capacitive Sensors
* Advantages
o Low power
o High accuracy
o Temperature independent
+ Important for a lot of automobile applications
o Reciprocal
* Disadvantages
o Parasitic capacitance
o Small signal

What about Actuators?
* Traditionally only sensors were developed for automobiles
* Actuators started to become popular as MEMs development costs decreased
* Popular actuators include
o Microphones
o Fuel injection nozzles

General MEMS Packaging
* The most important and expensive part of a MEMS sensor/actuator
o ~45% of the cost of designing a MEMS device is spent on packaging
* Often times packaging constraints will prevent a design from being produced
o May require too complex of a package design for realistic implementation
* Package can greatly change the response of a device
o Sensitivity/Dynamic Range/etc all effected by package

Automotive MEMS Packaging
* Automotive sensors generally only allowed to have 3 wires connected to them
o Minimizes cost
* Environment concerns are especially important in automotive applications

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PPT : Automotive Sensors: MEMS Category : General Auto
Source : www.ann.ece.ufl.edu
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